Important notice
The course guide is provisional.
The PDF version of the course guide may take a few days to become available in the DDD.
Advanced Nanofabrication
Code: 45736Credits: 3
| Degree programme | Type | Course |
|---|---|---|
| Applied Nanoscience: From Materials to Devices | OP | 1 |
Contact lecturer
- Name :
- Francesc Perez Murano
- Email :
- francesc.perez@uab.cat
Teaching staff
- Iñigo Martin Fernandez
- Esteve Amat Bertran
- Marta Fernandez Regulez
- Jordi Llobet Sixto
Group languages
You can consult this information at the end of the document.
Prerequisites
It is advisable to have prior knowledge of Nanofabrication
Objectives
• To know in depth the most common methods of nanostructuring of surfaces.
• Understand in detail the performance and limitations of the main methods of lithography.
• To enable students to design a process for the fabrication of devices and nanostructures.
• Gain practical knowledge on the use of nanofabrication equipment.
• Know the state of the art in nanofabrication and the main directions of the current evolution lines of this discipline.
Learning outcomes
- CA14 (Design nanolithography processes.) Design nanolithography processes.
- CA15 (Plan a complete nanofabrication process in a clean room.) Plan a complete nanofabrication process in a clean room.
- CA16 (Adapt nanodevice manufacturing processes according to the applications.) Adapt nanodevice manufacturing processes according to the applications.
- KA13 (Identify current and emerging nanofabrication methods.) Identify current and emerging nanofabrication methods.
- KA14 (Select the appropriate processes and nanomaterials in the manufacture of nanometric structures and devices.) Select the appropriate processes and nanomaterials in the manufacture of nanometric structures and devices.
- SA16 (Analyse the development of new nanofabrication processes and new applications of these processes.) Analyse the development of new nanofabrication processes and new applications of these processes.
- SA17 (Analyse the specific requirements for the correct performance of a nanolithography process.) Analyse the specific requirements for the correct performance of a nanolithography process.
- SA18 (Select the process conditions according to the characteristics of the nanostructure or nanodevice to be manufactured.) Select the process conditions according to the characteristics of the nanostructure or nanodevice to be manufactured.
Contents
State-of-the-art nanofabrication methods.
Relevant applications of nanofabrication for material nanostructuring and device fabrication.
Advanced nanolithography process design.
Hands-on project on cleanroom-based nanofabrication.
Learning activities and methodology
| Title | Hours | ECTS | Learning outcomes |
|---|---|---|---|
| Realization of the bilbiography work on advanced nanofabrication | 12 | 0.48 | KA13, KA14, SA16 |
| Supervision of a bibliography work on advanced nanofabrication | 5 | 0.2 | KA13, KA14, SA16 |
| Design of a process flow | 4 | 0.16 | CA14, CA15, KA14, SA17, SA18 |
| Webinars | 6 | 0.24 | KA13, SA16, SA18 |
| Documentation and analysis of the webinars | 12 | 0.48 | KA13, KA14, SA16 |
| Practical realization and characterization of a fabrication process flow | 5 | 0.2 | CA14, CA15, SA18 |
| Carrying out the practical work, documentation and presentation | 12 | 0.48 | CA14, CA15, CA16, KA14, SA17, SA18 |
| Master class on advanced nanofabrication topics | 6 | 0.24 | CA16, KA13, KA14, SA16, SA18 |
| Supervision of the practical work | 4 | 0.16 | CA14, CA15, KA14, SA17, SA18 |
Lectures / Lectures
Laboratory Practices
Tutorials
Completion of assignments / reports
Reading of articles of interest
Seminars
Assessment
Continuous assessment activities
| Title | Weight | Hours | ECTS | Learning outcomes |
|---|---|---|---|---|
| Practical work | 15% | 2 | 0.08 | CA14, CA15, SA18 |
| Exam | 10% | 2 | 0.08 | KA13, KA14, SA16, SA17 |
| Oral presentation of work | 25% | 1 | 0.04 | CA14, CA15, CA16, KA13, KA14, SA16, SA17, SA18 |
| Interaction in webinars | 20% | 2 | 0.08 | KA13, SA16, SA17 |
| Delivery of reports | 30% | 2 | 0.08 | CA14, CA15, CA16, KA13, KA14, SA16, SA17, SA18 |
The student's ability to carry out a complete nanofabrication process will be assessed, from the design, process selection, realization or characterization aspects.
Special emphasis will be placed on the documentation to be submitted and on the students' analytical skills.
Bibliography
Research articles (proposed by teachers as a result of research literature by students)
Manuals teams
Datasheets materials
Books nanofabrication
Software
Free software is used to design manufacturing processes and lithography mask layouts
Course groups and languages
The information provided is provisional until November 30. After this date, you will be able to consult the language of each group through this link. To access the information, you will need to enter the course CODE
| Type of teaching | Group | Language | Semester | Shift |
|---|---|---|---|---|
| (TEm) Theory (master) | 1 | English | first semester | afternoon |